Overview
A partner in microfabrication, for all your ideas.
Every project is a challenge requiring a unique solution. We provide a personal solution to your technical challenges, using a flexible and collaborative approach.
Our unique strength lies in the development of custom devices and the agility required.
Our processes
We provide expertise in processing CMOS, MEMS and Photonic devices. In particular the development of custom devices, according to your specifications.
Etching
Dry etching (DRIE, RIE)
Wet processing (f.e. KOH, TMAH)
Thin Film Depositions
Dry and Wet thermal oxidations
PECVD (SiO2 , TEOS, SixNx, SiC)
LPCVD (TEOS, SixNx, a-Si, p-Si, SiC)
PVD (sputtering, e-beam)
Lithography
ASML i-line stepper
SUSS mask alligner
Various resists available
Metrology
Optical (fluorescent) imaging
SEM
Particle counting
Layer thicknesses
Optical properties
Electrical properties
Polymer processing
PDMS
SU-8
COC
01 Consultation
We provide consultation tailored to your needs. Leveraging our 7+ years of cleanroom expertise, we are able to offer the right solution to your technical problem.
02 Prototyping
From idea to prototype, in our foundry we can provide your very first prototype of your ideas!
03 Small batch fabrication
Ready to validate! Our capabilities enable small volume fabrication using proven processes combined with customized methods.
muFAB
Semiconductor fabrication and process consultation for CMOS, MEMS and integrated photonics – from prototype to small batch manufacturing.
Pages
Contact
+31(0)617725132
Delft, The Netherlands